Aperture for off-axis illumination and projection exposure appar

Details Aperture for off-axis illumination and projection exposure appar Aperture for off-axis illumination and projection exposure appar

1996-08-06

1998-03-10

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, 355 67, 359227, 359232, G03B 2742, G03B 2752, G03B 2754

Patent

active

057267383

ABSTRACT:
An aperture for an off-axis illumination (OAI) and a projection exposure apparatus which employs the same. In the aperture for an OAI having a light-intercepting region and a light-transmitting region, at least a portion of the light-transmitting region is prismoidal and diffracts incident light toward the periphery of the condenser lens. Accordingly, light intensity is increased due to an increased light-transmitting region, which can lead to a reduction in the exposure time required for photolithography procedures and to an increased productivity of semiconductor devices.

REFERENCES:
patent: 5348837 (1994-09-01), Fukuda et al.
patent: 5446587 (1995-08-01), Kang et al.
patent: 5552856 (1996-09-01), Shiraishi et al.

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