Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1996-09-06
1998-12-29
Chu, John S.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430190, 430192, 430905, G03F 7004, G03F 7023
Patent
active
058539530
ABSTRACT:
The invention provides novel polymers and photoresist compositions that comprise a photoactive component and use such polymers as a resin binder component. The polymers of the invention in general comprise at least one repeating unit that includes a moiety that has a high carbon content, and preferably is an aromatic group. Preferred polymers of the invention comprise at least one repeating unit that includes a moiety that is an extended aromatic ring, or polycyclic aromatic ring system containing 2 or more rings, preferably at least two of the rings being fused, and from about 3 to 8 ring members in each ring. Photoresists of the invention include both positive-acting and negative-acting compositions and contain a resin binder component that comprises the described polymer.
REFERENCES:
patent: 4828958 (1989-05-01), Hayase et al.
patent: 5177172 (1993-01-01), Toukhy
patent: 5437952 (1995-08-01), Hirai et al.
patent: 5514520 (1996-05-01), Thackeray et al.
patent: 5529880 (1996-06-01), Zampini et al.
patent: 5541263 (1996-07-01), Thackeray et al.
Chu John S.
Goldberg Robert L.
Shipley Company L.L.C.
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