Machines not elsewhere specified – Miscellaneous
Patent
1997-08-05
1998-12-29
Davis, Antoine Duval
Machines not elsewhere specified
Miscellaneous
1599
Patent
active
D04033370
REFERENCES:
patent: 5391275 (1995-02-01), Mintz
patent: 5456756 (1995-10-01), Ramaswami et al.
patent: 5552124 (1996-09-01), Su
Applied Materials Inc.
Davis Antoine Duval
LandOfFree
High conductance low wall deposition upper shield does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High conductance low wall deposition upper shield, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High conductance low wall deposition upper shield will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1415114