Electricity: electrical systems and devices – Safety and protection of systems and devices – With specific current responsive fault sensor
Patent
1990-10-23
1992-09-08
Hille, Rolf
Electricity: electrical systems and devices
Safety and protection of systems and devices
With specific current responsive fault sensor
357 81, 361382, 361387, 361388, 165 804, 165 802, 16510433, H01L 2302, H01L 2504
Patent
active
051463148
ABSTRACT:
In a semiconductor device, a thin, synthetic diamond film (i.e. a man made film) enhances the transfer of heat from a semiconductor circuit chip to a cooling medium. The heat generating semiconductor circuit chip is located in efficient thermal transfer engagement with one surface of a synthetically deposited diamond film. The opposite surface of the diamond film forms the bottom wall of a cavity that contains a cooling medium. In one embodiment of the invention, the cavity is formed by depositing the diamond film on the surface of a silicon substrate, and then etching the silicon substrate to form an open-top cavity having side walls that comprise the silicon substrate, and having a bottom wall that comprises the diamond film. In a second embodiment of the invention, the open-top cavity is formed by an apertured silicon preform that is bonded to the diamond film. A capping member closes the top of the cavity. A cooling medium is placed within the cavity a fluid cooling medium may be circulated. through the cavity by the use of an inlet and an outlet that are located in the capping member.
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Hancock Earl C.
Hille Rolf
Ostrowski David
Sirr Francis A.
The University of Colorado Foundation Inc.
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