Method for continuously forming a functional deposit film of lar

Details Method for continuously forming a functional deposit film of lar Method for continuously forming a functional deposit film of lar

1995-09-14

1997-05-13

Breneman, R. Bruce

Coating processes

Direct application of electrical, magnetic, wave, or...

Plasma

118723MW, H05H 130

Patent

active

056290543

ABSTRACT:
A method for continuously forming a functional deposited film of large area with a microwave plasma-assisted CVD method, characterized by including:

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