Thermal trench isolation

Details Thermal trench isolation Thermal trench isolation

1994-08-08

1995-12-05

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 69, 437 72, 148DIG50, H01L 2176

Patent

active

054729041

ABSTRACT:
A process useful for isolating active areas of semiconductor devices in which an isolation trench is created in a substrate, the isolation trench being lined with an oxidation barrier and filled with a thick film. An oxidation step is performed in which the thick film is oxidized. The oxidation is self-limiting as the oxidation barrier prevents the substrate surrounding the trench from being oxidized.

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