Pleated sheet microelectromechanical transducer

Electrical generator or motor structure – Non-dynamoelectric – Charge accumulating

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

200 1R, H02N 100

Patent

active

054790611

ABSTRACT:
An electrically and mechanically robust microelectromechanical transducer is formed of a pleated dielectric sheet having patterned electrical conductors on the opposing faces thereof. The pleats define a plurality of spaced apart walls, with each wall including an electrically conductive portion at one side thereof. Positive and negative voltages, applied to opposite faces of the pleated sheet, cause the walls to move towards one another by electrostatic attraction. The walls can also move away from one another by electrostatic repulsion upon application of appropriate voltages. The microelectromechanical transducer may be fabricated by fabricating a sheet with integral pleats or by forming a "self-pleating" flat sheet which forms pleats after conductor fabrication thereon.

REFERENCES:
patent: 2975307 (1961-03-01), Schroeder et al.
patent: 3008014 (1961-11-01), Williamson et al.
patent: 3153229 (1964-10-01), Roberts
patent: 3315103 (1967-04-01), Duff et al.
patent: 3345469 (1967-10-01), Rod
patent: 3389226 (1968-06-01), Peabody
patent: 3544733 (1970-12-01), Reylek
patent: 4034332 (1977-07-01), Alais
patent: 4042438 (1977-08-01), Kawakami et al.
patent: 4160882 (1979-07-01), Driver
patent: 4206369 (1980-06-01), Lewiner et al.
patent: 4207442 (1980-06-01), Freeman
patent: 4342935 (1982-08-01), Kallmeyer et al.
patent: 4384230 (1983-05-01), Wisner
patent: 4429190 (1984-01-01), Stockbridge
patent: 4510412 (1985-04-01), Suda et al.
patent: 4615591 (1986-10-01), Smith et al.
patent: 4678955 (1987-07-01), Toda
patent: 4721447 (1988-01-01), Erckmann
patent: 4789803 (1988-12-01), Jacobsen et al.
patent: 4814657 (1989-03-01), Yano et al.
patent: 4841191 (1989-06-01), Takata et al.
patent: 4863252 (1989-09-01), McCarthy et al.
patent: 4887248 (1989-12-01), Griebeler
patent: 4897592 (1990-01-01), Hyde
patent: 5001381 (1991-03-01), Watanabe
patent: 5113566 (1992-05-01), Weekamp et al.
patent: 5206557 (1993-04-01), Bobbio
PCT International Search Report dated Mar. 23, 1992 of International Appln. No. PCT/US91/08901 filed Nov. 25, 1991.
Silicon Micromechanics: Sensors and Actuators on a Chip, SPECTRUM, Jul. 1990, Howe, R. T. et al., University of California at Berkeley; Gabriel, K. J. et al., AT&T Bell Laboratories.
Silane Coupling Agent Chemistry, Arkles, Silicon Compounds Register and Review, 1987, Petrarch Systems, pp. 54-59.
Parylene Conformal Coatings Specifications and Properties, Specialty Coating Systems, Inc. 1992, Union Carbide.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Pleated sheet microelectromechanical transducer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Pleated sheet microelectromechanical transducer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Pleated sheet microelectromechanical transducer will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1370950

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.