Method of making a micromechanical silicon-on-glass tuning fork

Details Method of making a micromechanical silicon-on-glass tuning fork Method of making a micromechanical silicon-on-glass tuning fork

1994-02-04

1996-02-20

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

1566291, 1566331, 1566341, 1566561, 1566571, G01P 904

Patent

active

054925967

ABSTRACT:
A micromechanical tuning fork gyroscope fabricated by a dissolved silicon wafer process whereby electrostatic bonding forms a hermetic seal between an etched glass substrate, metal electrodes deposited thereon, and a silicon comb-drive tuning fork gyroscope. The dissolved silicon wafer process involves single sided processing of a silicon substrate, including the steps of etching recesses, diffusing an etch resistant dopant into the silicon substrate, and releasing various components of the silicon gyroscope by etching through the diffusion layer in desired locations. The glass substrate also undergoes single sided processing, including the steps of etching recesses, depositing a multi-metal system in the recesses, and selectively etching portions of the multi-metal system. One substrate is inverted over the other and aligned before anodic bonding of the two substrates is performed.

REFERENCES:
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4815472 (1989-03-01), Wise et al.
patent: 4881410 (1989-11-01), Wise et al.
patent: 5013396 (1991-05-01), Wise et al.
patent: 5055838 (1991-10-01), Wise et al.
patent: 5169472 (1992-12-01), Goebel
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5313835 (1994-05-01), Dunn
patent: 5329815 (1994-07-01), Dunn et al.
patent: 5353638 (1994-10-01), Marek

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