1988-05-12
1990-04-03
Arnold, Bruce Y.
G02B 2746
Patent
active
049135244
ABSTRACT:
An optical system wherein a mask pattern occurring at a predetermined period is imaged with a period less than the predetermined period. Spatial filter means are disposed within the optical system for permitting only the two (positive and negative) first orders of light from an illumination source diffracted by the mask pattern to pass therethrough.
REFERENCES:
patent: 3563634 (1971-02-01), Parks et al.
patent: 4360269 (1982-11-01), Iwamoto et al.
Goodman, J. W., Introduction to Fourier Optics, McGraw Hill, N.Y., pp. 141-144.
Arnold Bruce Y.
Grimes Edwin T.
Murphy Thomas P.
The Perkin-Elmer Corporation
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