Spin castable mixtures useful for making deep-UV contrast enhanc

Details Spin castable mixtures useful for making deep-UV contrast enhanc Spin castable mixtures useful for making deep-UV contrast enhanc

1991-05-07

1993-03-23

Hamilton, Cynthia

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Radiation sensitive composition or product or process of making

430339, 430156, 430509, 430502, 430517, 430928, 430325, 430326, 430396, 524186, G03F 7095, G03C 1727

Patent

active

051962950

ABSTRACT:
Spin castable mixtures are provided which are useful for applying onto photoresist surfaces to produce a contrast enhancement layer employing .alpha.-alkyl-N-alkyl nitrones in combination with an inert organic binder and solvent. The .alpha.-alkyl-N-alkyl nitrones can be used with 200-300 nanometers UV light.

REFERENCES:
patent: 3991261 (1976-11-01), Gruber et al.
patent: 4623611 (1986-11-01), West
patent: 4677049 (1987-06-01), Griffing et al.
Sir Derek Barton et al, eds, Comprehensive Organic Chemistry, vol. 2, "Nitrogen Compounds, Carboxylic Acids, Phosphorus Compounds", ed by I. O. Sutherland, Pergamon Press Ltd., Elmsford, New York, 1979, pp. 499-510, 578-590.
J. Hamer and A. Macaluso, Chemical Reviews, "Nitrones", 1964, vol. 64, pp. 473-495.

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