Semiconductor integrated circuit device having multi-level wirin

Details Semiconductor integrated circuit device having multi-level wirin Semiconductor integrated circuit device having multi-level wirin

1997-11-03

1999-11-16

Chaudhuri, Olik

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257303, 257306, H01L 27108, H01L 2976, H01L 2994, H01L 31119

Patent

active

059862998

ABSTRACT:
A semiconductor integrated circuit device of the invention is provided with a memory cell array portion and a peripheral circuit portions. In the memory cell array portion, a plurality of plugs which penetrate each of a plurality of interlayer insulating films and the sides of which are almost vertical are directly connected in sequence. In the peripheral circuit portion, a plurality of plugs are mutually connected through contact pads for wiring.

REFERENCES:
patent: 5365095 (1994-11-01), Shono et al.
patent: 5578847 (1996-11-01), Aoki et al.
patent: 5689126 (1997-11-01), Takaishi
patent: 5717251 (1998-02-01), Hayashi et al.
patent: 5740099 (1998-04-01), Tanigawa
patent: 5748521 (1998-05-01), Lee

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