Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1993-09-16
1994-09-06
Powell, William
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156646, 1566591, 156662, 252 791, H01L 21306, B44C 122
Patent
active
053445260
ABSTRACT:
A diamond surface is selectively etched by forming a mask on a surface of diamond, and etching the diamond surface with a mixture of oxygen-containing gas and an inert gas, in which a concentration of oxygen in terms of O.sub.2 is from 0.01 to 20% based on the whole volume of the mixture.
REFERENCES:
patent: 5006203 (1991-04-01), Purdes
patent: 5102498 (1992-04-01), Itoh et al.
patent: 5250149 (1993-10-01), Kimoto et al.
Nishibayashi Yoshiki
Shikata Shin-ichi
Powell William
Sumitomo Electric Industries Ltd.
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