Secondary electron emission control in electron microscopes

Details Secondary electron emission control in electron microscopes Secondary electron emission control in electron microscopes

1986-10-30

1988-05-10

Fields, Carolyn E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250397, H01J 3704

Patent

active

047437570

ABSTRACT:
In a scanning electron microscope, a co-planar, split grid is interposed between an electron bombarded specimen and scintillator. A first positive potential is applied to one element of the split grid and a positive potential, variable with respect to the first potential, is applied to the other grid element for selectively controlling the collection of secondary emission electrons to thereby eliminate uneven secondary electron distribution that may result from various topographical features of the specimen.

REFERENCES:
patent: 4596929 (1986-06-01), Coates

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