Method for improving adhesion to a spin-on-glass

Details Method for improving adhesion to a spin-on-glass Method for improving adhesion to a spin-on-glass

1994-09-01

1996-09-10

Dang, Thi

Fishing, trapping, and vermin destroying

437231, 437238, 437978, 216 38, H01L 21469

Patent

active

055545670

ABSTRACT:
A method is described for eliminating problems of adhesion, including peeling and blistering, between the surface of a cured spin- on-glass layer and a second deposited layer of a different material. After curing, and prior to the deposition of the second layer, the layer of spin-on-glass is subjected to a short heat treatment in vacuum. The second layer is then deposited without breaking the vacuum.

REFERENCES:
patent: 4986878 (1991-01-01), Malazgirt et al.
patent: 5003062 (1991-03-01), Yen
patent: 5254497 (1993-10-01), Liu
patent: 5334554 (1994-08-01), Lin et al.
patent: 5364818 (1994-11-01), Ouellet
patent: 5376590 (1994-12-01), Machida et al.
patent: 5447613 (1995-09-01), Ouellet
patent: 5457073 (1995-10-01), Ouellet

Affiliated with

Also associated with

Rating

Method for improving adhesion to a spin-on-glass does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for improving adhesion to a spin-on-glass, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for improving adhesion to a spin-on-glass will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1320262