Process for removing contaminant

Details Process for removing contaminant Process for removing contaminant

1987-10-30

1989-08-01

Lacey, David L.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156640, 156644, 156662, 156902, B44C 122, H01L 21306

Patent

active

048530816

ABSTRACT:
Contaminant is removed from the interior of the holes in the vicinity of preselected locations by etching in a gaseous plasma wherein the sheath voltage is controlled in order to direct ions of the plasma to contact the interior of the holes in the vicinity of the preselected locations.

REFERENCES:
patent: 4012307 (1977-03-01), Phillips
patent: 4162932 (1979-07-01), Konicek
patent: 4328081 (1982-05-01), Fazlin
patent: 4425210 (1984-01-01), Fazlin
patent: 4496420 (1985-01-01), Frohlich et al.
patent: 4540464 (1985-09-01), Mueller et al.
patent: 4544439 (1985-10-01), Solomon et al.
patent: 4599134 (1986-07-01), Babu et al.
patent: 4615763 (1986-10-01), Gelorme et al.
patent: 4654115 (1987-03-01), Egitto et al.
patent: 4667058 (1987-05-01), Catalano et al.

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