Semiconductor planarization process

Details Semiconductor planarization process Semiconductor planarization process

1993-05-20

1994-09-27

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

437228, 437231, 437235, 437195, 156653, 1566591, 1566611, B44C 122

Patent

active

053504860

ABSTRACT:
A method for planarizing an integrated circuit structure having a glass layer overlying an oxide layer of an integrated circuit is presented. The method includes the steps of selectively etching portions of the glass structure that overlie portions of the oxide layer that have higher elevations than other portions of the oxide layer, and then etching the glass layer overall. The etching step includes forming a layer of photoresist over the glass layer, exposing selected areas of the photoresist over the portions of the oxide layer that have higher elevations than other portions of the oxide layer, removing the exposed areas of the photoresist, and etching the glass layer within the removed areas of the photoresist. The mask used in patterning the photoresist can be the same mask, or its negative, that is used in forming the metalization layer over which the oxide and glass layers have been formed.
Additionally, an integrated circuit structure is presented that includes a substrate in which integrated circuit elements are constructed, a first interconnection metalization over the substrate interconnecting selected ones of the integrated circuit elements, and an oxide layer over the substrate and the first metal interconnection pattern. A glass layer over the oxide layer is substantially planar between portions that overlie the metalization and portions that do not over lie the metalization.

REFERENCES:
patent: 4662064 (1987-05-01), Hsu et al.
patent: 4676867 (1987-06-01), Elkins et al.
patent: 4775550 (1988-10-01), Chu et al.
patent: 4978419 (1990-12-01), Nanda et al.
patent: 5139608 (1992-08-01), Grivna

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