Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters
Patent
1988-09-23
1992-08-18
Wieder, Kenneth A.
Electricity: measuring and testing
Impedance, admittance or other quantities representative of...
Lumped type parameters
324158R, 324690, G01R 3136
Patent
active
051402726
ABSTRACT:
A method of semiconductor surface measurement for measuring electrical characteristics of a surface of a semiconductor body is disclosed, by which an electrode, whose surface, which is opposite to the surface of a semiconductor substrate, is flat and the gap between the electrode and the surface is smaller than 0.5 .mu.m.
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Method for Measurement of Surface Charge Densities on Electrets Sessler and West Sep. 1970 Review of Scientific Instruments.
Haruta Ryo
Hosoki Shigeyuki
Mizutani Tatsumi
Munakata Chusuke
Nishimatsu Shigeru
Hitachi , Ltd.
Regan Maura K.
Wieder Kenneth A.
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