Exposure apparatus

Details Exposure apparatus Exposure apparatus

1997-10-22

1999-01-19

Pendegrass, Joan

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 69, 355 53, 250205, H01L 2127

Patent

active

058619445

ABSTRACT:
A scanning exposure apparatus for illuminating an area on a mask has a power supply system for supplying an exposure light source with an electric power regulated to a predetermined state; an illumination intensity varying system provided between the exposure light source and the substrate and adapted to regulate the attenuation rate of the illuminating light; an exposure amount measuring sensor for measuring the exposure energy of the illuminating light emitted from the exposure light source; and a control system for switching a constant power mode for supplying the exposure light source with a predetermined constant electric power through the power supply system, and a constant illumination intensity mode for controlling the function of the power supply system and the illumination intensity varying system in such a manner that the exposure energy measured by the exposure amount measuring sensor is maintained at a predetermined target value.

REFERENCES:
patent: 4660968 (1987-04-01), Alderman
patent: 4811056 (1989-03-01), Kimura
patent: 4924257 (1990-05-01), Jain
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5243377 (1993-09-01), Umatate
patent: 5333034 (1994-07-01), Gu et al.
patent: 5345292 (1994-09-01), Shiozawa
patent: 5473412 (1995-12-01), Ozawa

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