Method of making a surface etched shadow mask

Details Method of making a surface etched shadow mask Method of making a surface etched shadow mask

1990-10-31

1992-08-18

Zimmerman, John

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156664, C23F 102, B05D 132, H01L 2102

Patent

active

051396106

ABSTRACT:
A scratch reducing shadow mask for providing vapor deposition patterns of bonding metals onto a surface of a die. The shadow mask comprises a top surface and a bottom surface which define a plurality of vias for permitting vaporized bonding metals to pass through the mask. Mask bottom surface comprises a plurality of recessed regions to minimize the contact area of the mask with the die during the vapor deposition process.

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