Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material
Patent
1997-06-20
1999-11-23
Abraham, Fetsum
Active solid-state devices (e.g., transistors, solid-state diode
Non-single crystal, or recrystallized, semiconductor...
Amorphous semiconductor material
257 72, 257388, 257459, 257347, 349 39, 349 46, 349 49, G02F 113
Patent
active
059904925
ABSTRACT:
A self-aligned thin-film transistor, fabricated by depositing a conductive layer on a transparent insulating substrate, etching the conductive layer so as to form a gate electrode together with gate lines, forming a triple layer having of a gate insulating layer, a semiconductor layer and an extrinsic semiconductor layer sequentially deposited over the substrate, etching the triple layer so that only a part thereof covering the gate electrode only remains to form an active pattern, depositing a transparent conductive layer over the substrate to form a drain electrode part by etching the transparent conductive layer so that a part of the transparent conductive layer remains overlapping the gate electrode, depositing a negative photoresist over the substrate, exposing the negative photoresist to a light supplied from the back of the transparent substrate opposite the gate and developing the thus-exposed photoresist, forming a drain electrode by removing the part of a transparent conductive layer appearing in a region over the gate wherefrom the photoresist is removed, depositing a conductive layer over the substrate to form a source electrode together with data lines by etching the conductive layer so that there remains a portion of the conductive layer opposite to the drain electrode with respect to the gate electrode, and removing a portion of the extrinsic semiconductor layer exposed over the gate electrode so as to form a channel.
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Abraham Fetsum
Samsung Electronics Co,. Ltd.
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