Method for preparing thin specimens consisting of domains of dif

Details Method for preparing thin specimens consisting of domains of dif Method for preparing thin specimens consisting of domains of dif

1997-07-10

1999-11-23

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250304, 216 38, 216 39, 20419234, G01N 132

Patent

active

059904780

ABSTRACT:
The present invention discloses a method for preparing thin specimens suitable for physical analysis of a semiconductor microstructure by an instrument such as a transmission electron microscope. The method can be practiced by first forming support structures in a low density material medium for shielding a higher density material to be analyzed such that materials having different densities may be removed in a subsequent ion milling process at approximately the same milling rate with the lower density material supporting the higher density material during the ion milling process.

REFERENCES:
patent: 5498871 (1996-03-01), Koo et al.
patent: 5563412 (1996-10-01), Zandbergen et al.
patent: 5892225 (1999-04-01), Okihara

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