Pattern shape inspection apparatus for forming specimen image on

Details Pattern shape inspection apparatus for forming specimen image on Pattern shape inspection apparatus for forming specimen image on

1996-12-20

1998-07-07

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250306, H01J 3700

Patent

active

057773270

ABSTRACT:
A pattern shape inspection apparatus for displaying a specimen image on a display apparatus, and inspecting a pattern shape of the specimen image includes a memory for memorizing a reference image corresponding to an observation region and a display for simultaneously displaying the reference image and the specimen image. At least one of the image parameters of the specimen image and the reference image is corrected to aid in the comparison.

REFERENCES:
patent: 4039829 (1977-08-01), Kato et al.
patent: 4575630 (1986-03-01), Lukianoff
patent: 4777364 (1988-10-01), Sartore
patent: 5521517 (1996-05-01), Shida et al.

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