Method of making transducer

Details Method of making transducer Method of making transducer

1980-02-26

1981-10-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156647, 156648, 156650, 1566591, H01L 21306

Patent

active

042933730

ABSTRACT:
A silicon transducer including a silicon frame with one or more lands extending from a diaphragm or the like. The lands are interconnected by two thin strips formed integrally with the lands. The strips are essentially the transducer. The transducer is constructed by etching a boron doped wafer with a mixture of catechol, ethylene diamine and water.

REFERENCES:
patent: 3888708 (1975-06-01), Wise et al.
patent: 3912563 (1975-10-01), Tomioka et al.
patent: 4108715 (1978-08-01), Ishikawa et al.
INSPEC: IEEE Transactions on Electron Devices, vol. Ed-23, No. 6, pp. 579-583, Jun. 1976, Schottky Diodes and Other Devices on Thin Silicon Membranes by C. L. Huang et al.

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