Method for epitactic precipitation of crystalline material from

Details Method for epitactic precipitation of crystalline material from Method for epitactic precipitation of crystalline material from

1973-05-02

1978-05-16

Pitlick, Harris A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

118 495, 118 72, 148174, 148175, 156613, 156614, 156662, 427 86, H01L 21205, H01L 21306

Patent

active

040897354

ABSTRACT:
Described is a method of epitactic precipitation of crystalline material from the gaseous phase, upon substrate bodies. The carrier of the substrate bodies is moved in the reaction vessel during the precipitation process. At least one transport member, which carries the substrate bodies to be coated, is passed through locks into the reaction chamber, which is provided with the required reaction conditions and following precipitation, during which the reaction conditions are being maintained, is passed through locks out of the reaction chamber.

REFERENCES:
patent: 2877138 (1959-03-01), Vodonik
patent: 3148094 (1964-09-01), Kendall
patent: 3171755 (1965-03-01), Reuschel et al.
patent: 3341376 (1967-09-01), Spenke et al.
patent: 3392069 (1968-07-01), Merkel et al.
patent: 3394679 (1968-07-01), Bentley
patent: 3428500 (1969-02-01), Maeda
patent: 3501336 (1970-03-01), Dyer et al.
patent: 3602192 (1971-08-01), Grochowski et al.
patent: 3669774 (1972-06-01), Dismukes
patent: 3672948 (1972-06-01), Foehring

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