Preventing side-etching by adhering an overhang mask to the side

Details Preventing side-etching by adhering an overhang mask to the side Preventing side-etching by adhering an overhang mask to the side

1983-05-18

1984-09-11

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156633, 156651, 1566591, 156901, 156904, 430314, 430316, H01L 21308

Patent

active

044708726

ABSTRACT:
A metal member to be etched is subjected to chemical etching through a mask having a predetermined pattern whereafter that portion of the mask overhanging a side-etched portion resulting from the etching is bent down to be joined by an adhesive binder to the side wall of the side-etched portion to form an etching-resistant layer on the side wall. Then the metal member is subjected again to etching through the etching-resistant layer and the mask.

REFERENCES:
patent: 3006796 (1961-10-01), Bridwell
patent: 3544401 (1970-12-01), Jarman
patent: 4293377 (1981-10-01), Miyajima
patent: 4354897 (1982-10-01), Nakajima
Elijah et al., "Etching . . . Undercutting", IBM Technical Disclosure Bulletin, vol. 14, No. 9 (2/72) p. 2607.

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