Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1987-06-02
1988-10-18
Niebling, John F.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
2041922, C23C 1534
Patent
active
047785829
ABSTRACT:
A thin film metal alloy magnetic recording disk is manufactured by sputter deposition in an atmosphere consisting essentially of argon and hydrogen. A thin cobalt-based alloy magnetic film and a hydrogenated carbon overcoat are both formed in the same sputtering atmosphere by successive activation of a cobalt-based alloy target and a carbon target. The hydrogen present in the sputtering atmosphere has no adverse effect on the magnetic properties of the disk.
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Berthold Thomas R.
International Business Machines - Corporation
Nguyen Nam X.
Niebling John F.
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