Stock material or miscellaneous articles – Composite – Of metal
Patent
1995-06-02
1998-08-04
Kunemund, Robert
Stock material or miscellaneous articles
Composite
Of metal
428336, 428472, 428697, 148280, 148286, B32B 1518
Patent
active
057890862
ABSTRACT:
A reduced pressure device the reduced pressure chamber of which is constructed of stainless steel, and includes a passivation film formed on the exposed interior surface thereof. The film has a thickness of more than 50 .ANG. and is composed of two or more layers. One layer contains mainly chrome oxide formed in the vicinity of the interface of the stainless steel and the passivation film. The other layer contains mainly iron oxide formed in the vicinity of the surface of the passivation film. A passivation film may also be used with a thickness of more than 50 .ANG. and containing mainly a mixture of chrome oxide and iron oxide. Lastly a passivation film may also be used with thickness of more than 50 .ANG. and containing mainly chrome oxide.
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Surface Roughness--Parameters, Their Values and General Rules for Specifying Requirements, ISO International Standard 468, Aug. 1, 1982.
T. Ohmi, T. Okumura, K. Sugiyama, F. Nakahara, J. Murota Outgas-Free Corrosion-Resistant Passivation of Stainless Steel for Advanced ULSI Processing Equipment, 1988 pp. 99-106.
Kunemund Robert
Lund Jeffrie R.
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