Piezoelectric device and method for fabricating the same, and in

Details Piezoelectric device and method for fabricating the same, and in Piezoelectric device and method for fabricating the same, and in

1997-02-07

1999-10-05

Dougherty, Thomas M.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310328, 310366, H01L 41083, H01L 41047, B41J 2045

Patent

active

059629550

ABSTRACT:
A piezoelectric device including an insulating substrate and a displacement layer formed on the insulating substrate including a first common electrode, a piezoelectric layer and a plurality of second electrodes laid on the insulating substrate in the stated order, where a part of a surface of the piezoelectric device in a region where the first and the second electrodes overlap each other is projected out of the rest part of the surface. The thus-formed piezoelectric device can increase the amount of displacement of the displacement layer.

REFERENCES:
patent: 4752788 (1988-06-01), Yasuhara et al.
patent: 5215446 (1993-06-01), Takahashi et al.
patent: 5459501 (1995-10-01), Lee et al.
patent: 5473214 (1995-12-01), Hildebrand
patent: 5665249 (1997-09-01), Burke et al.
patent: 5691752 (1997-11-01), Moynihan et al.
patent: 5736994 (1998-04-01), Takahashi
Mills, et al., A piezoceramic fine-movement control, The Institute of Physics, pp.295-296, 1981.

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