Semiconductor lead planarity checker

Geometrical instruments – Gauge – Straightness – flatness – or alignment

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Details

33552, 33557, 33558, 33DIG2, 33 1BB, 340653, 73 378, G01B 502, G01B 702

Patent

active

051632322

ABSTRACT:
The planarity of semiconductor device pins is measured simultaneously by multiple pneumatic comparator circuits by detecting pressure changes proportional to pin position.

REFERENCES:
patent: 2852849 (1958-09-01), Groener
patent: 3538609 (1970-11-01), Minix
patent: 4221053 (1980-09-01), Bobel, II et al.
patent: 4400884 (1983-08-01), Baresh et al.
patent: 4754555 (1988-07-01), Stillman
patent: 4774768 (1988-10-01), Chiponis
Bendix Automation & Measurement Division, "Sheffield Modular Precisionaire Gaging", Catalog No. Prec.-2102-1071, 1971.

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