Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1989-10-30
1990-12-25
Nguyen, Nam X.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 427 39, 427 41, C23C 1434, B05D 306
Patent
active
049800418
ABSTRACT:
The adherence of the alignment layer of a liquid crystal cell is improved by simultaneously glow discharging and sputtering the alignment materials onto the conductors and substrates of the liquid crystal cell.
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Kaganowicz Grzegorz
Robinson John W.
General Electric Company
Hallacher L. L.
Irlbeck D. H.
Nguyen Nam X.
Tripoli J. S.
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