Process for producing thin-film transistor

Details Process for producing thin-film transistor Process for producing thin-film transistor

1985-06-10

1986-11-25

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29576R, 29578, 29591, 156652, 156653, 156656, 156657, 1566591, 156662, 156667, 357 4, 357 231, 427 88, 427 93, 427 94, H01L 21306, B44C 122, C03C 1500, C23F 102

Patent

active

046247378

ABSTRACT:
A gate insulating film, a high-resistivity semiconductor film, a low-resistivity semiconductor film and if necessary a conducting film are successively deposited in lamination without exposing them to any oxidizing atmosphere including atmospheric air, and then the source and drain electrodes are selectively formed.

REFERENCES:
patent: 4331758 (1982-05-01), Luo
patent: 4426407 (1984-01-01), Morin et al.

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