Radiant energy – Inspection of solids or liquids by charged particles
Patent
1992-08-13
1993-11-09
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 73105, H01J 3728
Patent
active
052605728
ABSTRACT:
A scanning probe microscope achieves increased resolution and speed in profiling a surface of a sample by producing an error signal representing a difference between a probe signal and a desired value of the probe signal. The error signal is compensated for delay in response of a position translator. The position translator moves in response to the compensated error signal to produce a change in the probe signal dependent upon how closely the probe moves along the sample surface. A signal representing height of the sample surface is produced by filtering and scaling the probe signal and summing the resulting signal with the compensated error signal. Both high frequency components of the probe signal and low frequency components of the compensated error signal are included in the sample surface height-representing signal, resulting in very high image resolution without sacrificing scanning speed.
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Berman Jack I.
Hoffman Charles R.
Wyko Corporation
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