Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1994-07-14
1995-05-02
Limanek, Robert P.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257349, 257351, 257352, 359 59, H01L 2701, H01L 2713
Patent
active
054122406
ABSTRACT:
A semiconductor device has an NMOS transistor and a PMOS transistor formed on at least one monocrystal Si region formed in a thin-film Si layer formed on an insulation layer. The thickness T.sub.BOX of the insulation layer on which the NMOS and PMOS transistors are formed, the voltage V.sub.SS of a low-voltage power supply and the voltage V.sub.DD of a high-voltage power supply for the NMOS and PMOS transistors satisfy a relationship expressed by the following equation:
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P. H. Woerlee et al., "A Half-Micron CMOS Technology Using Ultra-thin Silicon On Insulator", IEDM 90-583 pp. 25.1.1-25.1.4, (1990).
A. Kamgar et al., "Ultra-High Speed CMOS Circuits in Thin SIMOX Films", IEDM 89-829, pp. 34.4.1-34.4.4, (1989).
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Inoue Shunsuke
Koizumi Toru
Miyawaki Mamoru
Sugawa Shigetoshi
Canon Kabushiki Kaisha
Limanek Robert P.
Tran Minhloan
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