Scanning probe microscope and method for measuring surfaces by u

Details Scanning probe microscope and method for measuring surfaces by u Scanning probe microscope and method for measuring surfaces by u

1994-03-18

1995-11-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 250423F, 73105, H01J 3728

Patent

active

054689597

ABSTRACT:
A microscope comprises a cantilever having a distal end equipped with an electrically conductive probe allowing current to flow and having a fine tip whose voltage is controllable, a position control mechanism for controlling position of a sample with respect to a base end of the cantilever, a small displacement measuring mechanism for measuring a deflection amount of the cantilever, and a deflection control mechanism for controlling deflection of the cantilever so as to adjust a distance between the fine tip of the probe and the sample. A method for measuring surfaces using this novel microscope comprises steps of: maintaining deflection of the cantilever at a constant value by using the small displacement measuring mechanism and the deflection control mechanism; applying a constant voltage between the electrically conductive probe and the sample; scanning the sample along surface of the sample with the probe, while a tunneling current is maintained at a constant value by using the position control mechanism; and measuring a control amount of the position control mechanism in a direction vertical to the sample and a control amount of the deflection control mechanism.

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