Method of manufacturing a semiconductor integrated circuit devic

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257377, 257587, 257588, 257591, 257755, 257757, 257773, 257776, H01L 2972, H01L 2702, H01L 2348, H01L 2946

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052801888

ABSTRACT:
A semiconductor device includes a bipolar transistor and an IIL element fabricated on a single wafer. The emitter region of the bipolar transistor is formed by diffusing the impurity of an impurity layer formed in contact with the base region therein. The impurity layer is formed of a polycide layer formed of a polysilicon layer doped with an impurity and a metal silicide layer laminated on the polysilicon layer, a laminated layer of a polysilicon layer and a refractory metal layer, or a metal silicide layer.

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