Method of manufacturing a chromium oxide film

Details Method of manufacturing a chromium oxide film Method of manufacturing a chromium oxide film

1976-07-27

1978-06-20

Goolkasian, John T.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156655, 156667, 204192D, 204192C, 204192P, 204192N, 204192SP, 427248C, 427248R, C23C 1500, C23C 1108

Patent

active

040960269

ABSTRACT:
A method of manufacturing a chromium oxide film which comprises the steps of scattering particles of chromium metal by means of, for example, sputtering in an atmosphere selected from the group consisting of CO.sub.2 gas, CO gas, a mixture of CO.sub.2 gas and CO gas, a mixture of CO.sub.2 gas and inert gas, a mixture of CO gas and inert gas and a mixture of CO.sub.2 gas, CO gas and inert gas; oxidizing the scattered particles of chromium metal with the atmosphere; and depositing the resultant chromium oxide film on a substrate.

REFERENCES:
patent: 3650921 (1972-03-01), Peters
patent: 3669863 (1972-06-01), Peters
patent: 3681227 (1972-08-01), Szupillo
patent: 3715244 (1973-02-01), Szupillo
patent: 3873341 (1975-03-01), Janus
Sinclair et al., "Materials for Use in a Durable Selectively Semitransparent Photomask," J. Electrochem Society, Feb. 1971, pp. 341-344.
Bratto et al., IBM Tech. Dir. Bull., High-Temperature . . . Process, vol. 15, No. 2 (7-1972), p. 685.

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