Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1997-10-20
1999-08-10
Baxter, Janet
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
430512, 430908, G03C 1492
Patent
active
059357606
ABSTRACT:
Thermosetting, bottom-applied polymeric anti-reflective coatings exhibiting high optical density, rapid plasma etch rates, high solubility in preferred coating solvents, excellent feature coverage, and improved stability in solution are disclosed. The principal component of these new anti-reflective coatings is a polyester resin produced by the reaction of one or more difunctional aliphatic carboxylic acids with a stoichiometric excess of a di- and/or a trifunctional aliphatic primary alcohol, wherein at least one of the dicarboxylic acids may contain a reactive methylene (--CH.sub.2 --) group. The resulting polyester resin reaction product is further modified by attaching light-absorbing groups to some or all of the reactive methylene groups (if present) and/or hydroxy groups present on the resin. The dye-attached polyester resin is combined with an aminoplast crosslinking agent and acid catalyst in a suitable solvent system to form the final anti-reflective coating.
REFERENCES:
patent: 4551403 (1985-11-01), Miyakawa et al.
patent: 5234990 (1993-08-01), Flaim et al.
patent: 5693691 (1997-12-01), Flaim et al.
patent: 5733714 (1998-03-01), McCulloch et al.
patent: 5736301 (1998-04-01), Fahey et al.
Brewer Terry Lowell
Flaim Tony D.
Hester Colin
Shao Xie
Amjad Holly
Ashton Rosemary
Baxter Janet
Brewer Science Inc.
Peoples Veo
LandOfFree
Thermosetting polyester anti-reflective coatings for multilayer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Thermosetting polyester anti-reflective coatings for multilayer , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Thermosetting polyester anti-reflective coatings for multilayer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1118907