Method for forming a color filter

Details Method for forming a color filter Method for forming a color filter

1996-03-06

1999-08-10

Nuzzolillo, Maria

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Screen other than for cathode-ray tube

430 22, 430322, G03F 900

Patent

active

059357410

ABSTRACT:
A color filter having patterns for aligning a mask and a method of manufacturing the same. An align key pattern causes a step difference in height of an overlaid resist layer which, in turn, diffracts a laser beam. The diffracted light is detected to generate an alignment signal to which a mask for exposing the subsequent resist layer is aligned.

REFERENCES:
patent: 4343878 (1982-08-01), Chiang
patent: 4777117 (1988-10-01), Murata et al.
patent: 5212028 (1993-05-01), Fujino
patent: 5262257 (1993-11-01), Fukuda et al.
patent: 5422207 (1995-06-01), Yoda et al.

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