Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1997-03-07
1999-02-02
Gulakowski, Randy
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430169, 430189, 430190, 528 99, 534558, 534561, 546156, 546159, 546171, 546177, G03C 152, C08G 5900
Patent
active
058662952
ABSTRACT:
The present invention relates to novel photosensitive quinolone compounds, specifically novel 3-diazo 2,4-quinolinedione compounds, that may be used in a variety of applications, such as, photosensitive coating compositions, pharmaceuticals, agricultural, amongst others. The invention further relates to a process for making the novel photosensitive 3-diazo 2,4-quinolinedione compounds. These compounds are particularity useful as a photoactive component in a positive working photoresist composition, particularity for use as a deep ultraviolet (UV) photoresist.
REFERENCES:
patent: 4339552 (1982-07-01), Lindemann
patent: 4588670 (1986-05-01), Kelly et al.
patent: 4601969 (1986-07-01), Clecak et al.
patent: 4622283 (1986-11-01), Gray
patent: 4735885 (1988-04-01), Hopf et al.
patent: 4853315 (1989-08-01), McKean et al.
patent: 5501936 (1996-03-01), Hosoda et al.
patent: 5532107 (1996-07-01), Oie et al.
patent: 5541033 (1996-07-01), Blakeney et al.
Database WPI, Section Ch, Week 7620, Derwent Publications Ltd., Class A89, AN 76-36548X XP002068176 and Japan 51 036 932 A (Unitika Ltd.) (abstract).
Database WPI, Section Ch, Week 7730, Derwent Publications Ltd., Class E19, AN 77-52765Y XP002068177 and Japan 52 018 320 A (Hitachi Ltd.) (abstract).
Wen-An Loong et al: Enchanced Oxygen Reactive Ion Etching Resistance of Diazonaphthoquinone-Poly(formyloxystyrene) Resist System by Photoactid Catalyzed Photo-Fries Rearrangement and Potassium Ion Treatment in Aqueous solution Microelectronic Engineering, vol. 13, No. 1 / 04, 1 Mar. 1991, pp. 101-104.
Derwent Abstract, Japanese 3079670, Nippon Kayaku KK, Aug. 23, 1989.
Derwent Abstract, Japanese 2061640, Toshiba KK, Aug. 26, 1988.
"Diazocyclopentadiene" by W. von E. Doering and C. H. DePuy, The Journal of the American Chemical Society, vol. 75, pp. 5955-5957, May 8, 1953.
Durham Dana L.
Khanna Dinesh N.
Oberlander Joseph E.
Clariant Finance (BVI) Limited
Gulakowski Randy
Jain Sangya
LandOfFree
Photosensitive quinolone compounds and a process of preparation does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Photosensitive quinolone compounds and a process of preparation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Photosensitive quinolone compounds and a process of preparation will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1115727