Abrading – Abrading process – Glass or stone abrading
Patent
1997-03-10
1999-08-10
Rose, Robert A.
Abrading
Abrading process
Glass or stone abrading
451290, 451271, B24B 700
Patent
active
059349794
ABSTRACT:
A chemical mechanical polishing apparatus includes a rotating plate on which a substrate is received, and a polishing pad which moves across the substrate as it rotates on the plate to polish the substrate. The load of the pad against the substrate, and the rotary speed of the plate, may be varied to control the rate of material removed by the pad.
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Applied Materials Inc.
Rose Robert A.
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