Method of making cantilever chip for scanning probe microscope

Details Method of making cantilever chip for scanning probe microscope Method of making cantilever chip for scanning probe microscope

1993-08-09

1995-01-31

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250234, 250306, 156647, 437225, G01B 734

Patent

active

053861108

ABSTRACT:
A method of making a cantilever chip for a scanning probe microscope wherein the cantilever chip includes a cantilever portion, a probe portion formed at a free end of the cantilever portion, a mirror portion formed on the cantilever portion on a side opposite to a side where the probe portion is formed, and a support portion for supporting the proximal end of the cantilever portion. A step is formed between the cantilever portion and the support portion, so that the support portion is set back from the surface of the cantilever portion on the side where the probe portion is formed. Semiconductors manufacturing processes and etching processes are used.

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