Transfer apparatus

Details Transfer apparatus Transfer apparatus

1995-08-31

1997-08-19

Underwood, Donald W.

Ventilation

Means combined with window

Tilting pane window

1984686, 414751, 414935, B65H 508

Patent

active

056581157

ABSTRACT:
A transfer apparatus is to be used for a wafer loader of an electron beam drawing apparatus, and is constructed particularly in consideration of downsizing of the apparatus as a whole, high-speed transfer for coping with high throughput, and prevention of adhesion of foreign matters for the application to DRAM of 64 and 256 megabits. A transferring mechanism for positioning and fixing an object to be transferred due to combination of positioning projections which are formed on fixing tables on which an object to be transferred is set and transferring arm assemblies and groove portions which are formed in a lower surface of the transferred object. Positioning projections are formed on fixing tables on which an object to be transferred is set and on a transferring arm, and a transferring mechanism for positioning and fixing the object by means of the combination of the positioning projections and groove portions formed in a lower surface of the object is disposed in parallel with a main apparatus. The transferring arm has a vertically moving mechanism and a waiting position of the arm is set in the middle of the transferring path. This transfer apparatus has the structure suitable for high-speed transfer and has less possibility of generation and adhesion of foreign matters. In addition, the apparatus can be reduced in size as a whole.

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