Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Patent
1998-10-02
2000-09-19
Rosenberger, Richard A.
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
356371, G01N 2188
Patent
active
061220469
ABSTRACT:
An optical inspection system for inspecting a substrate includes a light detector, a light source, a deflection system, an objective lens and an optical system. The light source produces an illuminating beam directed along a path to the substrate. The deflection system scans the illuminating beam on a scan line of the substrate. The objective lens focuses the illuminating beam on the substrate and coliects light reflected therefrom. The collected beam is angularly wider than the illuminating beam. The optical system directs the collected light beam along a path at least partially different than the path of the illuminating beam and focuses the collected beam on the light detector. In one embodiment, the system additionally includes at least one dark field detector for collecting light deflected from the substrate.
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Applied Materials Inc.
Rosenberger Richard A.
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