Showerhead-type discharge assembly for delivery of source reagen

Details Showerhead-type discharge assembly for delivery of source reagen Showerhead-type discharge assembly for delivery of source reagen

1995-03-10

1997-08-05

Bueker, Richard

Coating apparatus

Gas or vapor deposition

20429807, 2391323, 118666, 118667, 118688, 118724, C23C 1600

Patent

active

056538065

ABSTRACT:
An apparatus for dispersingly delivering a vapor-phase source reagent material containing a deposition species, to a substrate for deposition of such species thereon. The apparatus includes a disperser housing having a front wall with an array of discharge openings therein for discharging vapor-phase source reagent material from the housing interior volume onto a wafer or other substrate article mounted in vapor-receiving relationship to the disperser housing front wall. The front wall includes interior heat transfer passages arranged in a manifolded conformation for highly efficient temperature stabilization of the vapor discharged from the housing discharge openings, to produce highly uniform thickness deposited films on the substrate.

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