Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1997-11-26
2000-01-04
Resan, Stevan A.
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
2041922, 427131, 427249, C23C 1630, C23C 1632
Patent
active
060106018
ABSTRACT:
A significantly thinner boron carbide overcoat layer is provided for a magnetic disk which has the same durability as thicker prior art overcoat layers for protecting an underlying magnetic layer. By employing adhesion layers selected from the group consisting of Ge, Ru, WTiSi, WTi, Si, and Y between the magnetic layer and the overcoat layer, the durability of the overcoat layer is significantly increased over a single overcoat layer of B4C. Certain process steps in the making of the B4C overcoat layer still further enhance the durability of the B4C overcoat layer by maintaining the disk or substrate specimen at a floating potential in a plasma chamber and employing low levels of argon pressure and sputtering wattage.
REFERENCES:
patent: 4590031 (1986-05-01), Eichen et al.
patent: 4717632 (1988-01-01), Keem et al.
patent: 4724169 (1988-02-01), Keem et al.
patent: 4840844 (1989-06-01), Futamoto et al.
patent: 4883711 (1989-11-01), Shiroishi et al.
patent: 5068152 (1991-11-01), Mano et al.
patent: 5234560 (1993-08-01), Kadlec et al.
patent: 5236791 (1993-08-01), Yahisa et al.
patent: 5275850 (1994-01-01), Kitoh
patent: 5552204 (1996-09-01), Ahlert et al.
G. A. Samara et al., Sandia National Laboratories, "Low Temperature Dielectric Properties and ac Conductivities of the Icosahedral Boron Carbides", .COPYRGT. 1991 American Institute of Physics, pp. 77-84.
J. Rey et al., "Dry Friction and Wear of Chemically Vapour Deposited Boron Carbide Coatings", Surface and Coatings Technology, 36 (1988), pp. 375-386.
Yu. G. Gogotsi et al., "Tribochemical interactions of boron carbides against steel", Wear, 154(1992), pp. 133-140
S. Kaplan et al., Xerox Webster Research Center, "Characterization of amorphous carbon-hydrogent films by solid-state nuclear magnetic resonance", May 7, 1985, pp. 2-5.
M. F. Doerner and R. L. White, IBM General Products Div'n, "Characterization of Amorphous Carbon Films Using Substrate Curvature", pp. 647-656.
N. Savvides, J. Appl. Phys., vol. 58, No. 1, Jul. 1985, "Four-fold to three-fold transition in diamond-like amorphous carbon films: A study of optical and electrical properties" pp. 518-521.
Mark A. McKernan, "Magnetron sputter deposition of boron and boron carbide", Surface and Coatings Technology, 49 (1991), pp. 411-415.
M. K. Puchert et al., "Thickness-dependent stress in sputtered carbon films", J. Vac. Sci. Technol. A, vol. 12, No. 3, May/Jun. 1994, pp. 727-733.
R. Messier and R. C. Ross, "Evolution of microstructure in amorphous hydrogenated silicon", J. Appl. Phys., vol. 53, No. 9, Sep. 1982, pp. 6220-6225.
S. Saito et al., "Wear-Resistant Properties of Protective Layers Applied to Thin Film Metallic Media", IEEE Transactions on Magnetics, vol.Mag-23, No. 5, Sep. 1987, pp. 2398-2400.
Ahlert Richard Henry
Howard James Kent
Ullah Muhammad Inayet
Umphress Richard Donald
International Business Machines - Corporation
Resan Stevan A.
Ware Gray Cary
LandOfFree
Method of making magnetic disk with boron carbide overcoat layer does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of making magnetic disk with boron carbide overcoat layer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of making magnetic disk with boron carbide overcoat layer will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1069841