Power transistor having vertical FETs and method for making same

Details Power transistor having vertical FETs and method for making same Power transistor having vertical FETs and method for making same

1997-02-11

2000-05-09

Monin, Donald

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257334, 257401, H01L 2976, H01L 2978

Patent

active

060607467

ABSTRACT:
A power transistor having of a plurality of vertical MOSFET devices combined in parallel to achieve high-performance operation and methods of fabricating this device.

REFERENCES:
patent: 5208172 (1993-05-01), Fitch et al.
patent: 5293053 (1994-03-01), Malhi et al.
patent: 5489787 (1996-02-01), Amaratunga et al.
patent: 5504359 (1996-04-01), Rodder
patent: 5581100 (1996-12-01), Ajit

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