Photoelectron microscope

Details Photoelectron microscope Photoelectron microscope

1990-03-16

1991-09-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250423P, 378 43, H01J 4000, H01J 4012

Patent

active

050456962

ABSTRACT:
A photoelectron microscope wherein a normal conductive coil is used to produce a divergent magnetic field to form an enlarged photoelectron image of a specimen to be examined. The coil is only momentarily energized by pulse current, and in synchronism with the energization of the coil and while the change of the resultant magnetic field with time is small, the radiation source is actuated to produce a radiation pulse so that the photoelectrons produced upon irradiation of a specimen with the pulse flies through the magnetic field so as to be received by an image forming device. The image forming device is operated in synchronism with and a predetermined variable period of time after the actuation of the radiation source thereby to obtain photoelectron images of the specimen of different energy levels. By skimming only those photoelectrons of low energy which are emitted close to the axis of the magnetic field, it is possible to obtain images of high resolution.

REFERENCES:
patent: 4255661 (1981-03-01), Liebl
patent: 4486659 (1984-12-01), Turner
patent: 4829177 (1989-05-01), Hirsch
patent: 4912737 (1990-03-01), Ohsuka et al.

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