Optical path adjusting system with dual-axis wedge prisms

Details Optical path adjusting system with dual-axis wedge prisms Optical path adjusting system with dual-axis wedge prisms

1989-12-01

1991-09-03

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

2502062, G01J 120

Patent

active

050456792

ABSTRACT:
In an optical path adjusting system, an x-axis wedge prism and a y-axis wedge prism are disposed in opposition to each other on the incident optical path side of a condenser lens to which a laser beam is incident so that the x-axis wedge prism and the y-axis wedge prism are displaceable in the directions of x and y axes of a surface of a work respectivley. A position of irradiation of the laser beam on the condenser lens is detected by a detector and the detected position of irradiation is inputted to a controller. The controller supplies a driver with an error correction signal representing an error of the position of irradiation relative to a reference position. The x-axis wedge prism and the y-axis wedge prism are dispalced by the driver so that the laser beam is corrected to be parallel to an optical axis of the condenser lens.

REFERENCES:
patent: 4190759 (1980-02-01), Hongo et al.
patent: 4515447 (1985-05-01), Weimer et al.
patent: 4822974 (1989-04-01), Leighton
patent: 4850686 (1989-07-01), Morimoto et al.

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