Transfer and temperature monitoring apparatus

Details Transfer and temperature monitoring apparatus Transfer and temperature monitoring apparatus

1978-02-27

1980-05-06

Kendall, Ralph S.

Coating apparatus

With indicating, testing, inspecting, or measuring means

118500, 118729, 118730, C23C 1308, H01L 2168

Patent

active

042011523

ABSTRACT:
The temperature of a substrate being coated by molecular beam epitaxial techniques is monitored during the deposition process. The substrate is mounted on a holder that is brought by a carriage to a treating station where the deposition occurs. At the station, a pair of metal contact pins selectively contact a surface of the holder. One of the contact pins and the surface, when contacting, form a first thermocouple junction; a second thermocouple junction is formed by the second contact pin and surface. The thermocouple junctions have dissimilar properties so that a voltage indicative of the temperature of the object is derived between them while the pins and surface contact each other. The holder is transferred between the treating station and carriage by translational and rotational motion of the holder and the carriage. While the translational and rotational motions occur, contact between the surface of the holder and the pins is prevented.

REFERENCES:
patent: 3675563 (1972-07-01), Metreaud
patent: 3915765 (1975-10-01), Cho
patent: 4137865 (1979-02-01), Cho

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