4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Etching inorganic substrate

Yukihiro Kamide

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Cathode panel for a cold cathode field emission display and...

Electric lamp and discharge devices – With luminescent solid or liquid material – Vacuum-type tube
Reexamination Certificate

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Cathode panel for a cold cathode field emission display and...

Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Reexamination Certificate

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Dry etching apparatus and its manufacturing method

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Dry etching apparatus for rectangular substrate comprising plasm

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Dry etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
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Profile ID: LFUS-PAI-P-267264

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